高電圧/高電流電力供給
Material of flange :SUS304 or SUS316 on customer demand Material of adaptor : KOVAR Material of center pin : as described in individual P/N Applicable vacuum range with CF flange:1X 10-10 torr
Applicable vacuum range with KF flange:1X 10-8 torr (limited by user’s O-ring) Applicable temperature range with CF flange:-100 ℃ to 500 ℃
Applicable temperature range with KF flange:-100 ℃ to max temperature limited by user’s O-ring
Multiple pins Feedthrough
Material of flange :SUS304 or SUS316 on customer demand Material of adaptor : KOVAR Material of center pin : as described in individual P/N Applicable vacuum range with CF flange:1X 10-10 torr
Applicable vacuum range with KF flange:1X 10-8 torr (limited by user’s O-ring) Applicable temperature range:-100 ℃ to 180 ℃
説明
多端子 feedthrough
RF feedthrough (Vectra Imp)℃ :AMAT 0190-13558 / AMAT 0190-13298